Transcription of HIGH PERFORMANCE CLEANROOMS
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HIGH PERFORMANCE CLEANROOMS
high PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability ,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost. The CleanroomDesign Guidelines describe a number of successful and efficient design practices specificallyappropriate for cleanroom on actual measurement of operating cleanroom facilities and input from cleanroomdesigners, owners and operators, the Cleanroom Design Guidelines offer many successfuldesign approaches that apply to most cleanroom facilities.
Cleanroom design is a challenging field dominated by the need for high reliability, maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there
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