Transcription of HIGH PERFORMANCE CLEANROOMS - Lawrence Berkeley …
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HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost.
the current Good Manufacturing Practice should be able to reflect use of lower airflow. Best practice for ACRs is to design new facilities at the lower end of the recommended ACR range. Once the facility is built, monitoring and controlling based upon particle counts can be used to further reduce ACRs. Variable speed drives (VSDs) should be ...
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