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IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, …

ieee TRANSACTIONS ON APPLIED superconductivity , VOL. 17, NO. 2, JUNE 2007263 Niobium and Tantalum High Q Resonators forPhoton DetectorsR. Barends, J. J. A. Baselmans, J. N. Hovenier, J. R. Gao, S. J. C. Yates, T. M. Klapwijk, and H. F. C. HoeversAbstract We have measured the quality factors and phasenoise of niobium and tantalum coplanar waveguide microwaveresonators on silicon. The results of both materials are reach quality factors up to105. At low temperatures thequality factors show an anomalous increase, while the resonancefrequency remains constant for increasing power levels.

264 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, VOL. 17, NO. 2, JUNE 2007 and , with the cou-pling quality factor and the unloaded quality factor.

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