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1 Manuscript form of the Korea Test Conference Abstract We have designed and fabricated a novel vertical MEMS probe card, named GigaprobeTM, for multiple wafer testing of the fine pitch and high speed devices. The GigaprobeTM consists of probe pins and MEMS guides, in which simple etching and assemble process involved compared to the conventional MEMS probe cards. Due to its simple fabrication and structural merits, it can be applied to effective production level wafer testing of various types of modern semiconductor devices ranged from high speed memory to Soc. Keywords: probe card, vertical, MEMS, guide, fine pitch, high speed I. , , Cantilever Needle [1][2]. MEMS.

1 Manuscript form of the Korea Test Conference Abstract We have designed and fabricated a novel vertical MEMS probe card, named GigaprobeTM, for multiple wafer testing …

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  Testing, Wafer, Wafer testing

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