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MEMS ACCELEROMETERS - University of Michigan

very large and, for example, Analog Device used for his range of accelerometer a comb capac-itor having a suspended electrode with varying gap. Measurement showed that the integrated electronics circuit could resolve a change of the gap distance of only 20pm, a mere 1=5th of the silicon inter-atomic distance [2].

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  Mems, Trios, Accelerometers, Acpac, Mems accelerometer, Cap acitors

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