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MEMS Fabrication I : Process Flows and Bulk …
MEMS Fabrication I : Process Flows and bulk micromachining Dr. Thara Srinivasan Lecture 2. EE C245. U. Srinivasan Picture credit: Alien Technology Lecture Outline Reading Reader is in! (at South side Copy Central). Kovacs, bulk micromachining of Silicon, pp. 1536-43. Williams, Etch Rates for micromachining Processing, pp. 256-60. Senturia, Chapter 3, Microfabrication.. Today's Lecture Tools Needed for MEMS Fabrication Photolithography Review Crystal Structure of Silicon bulk Silicon Etching Techniques EE C245. U. Srinivasan . 1. IC Processing Cross-section Masks Cross-section Masks N-type Metal Oxide Semiconductor (NMOS) Process flow EE C245. Jaeger U. Srinivasan . CMOS Processing Processing steps Oxidation Photolithography Etching Chemical Vapor Jaeger Deposition Complementary Metal-Oxide-Semiconductor Diffusion Ion Implantation Evaporation and deposit Sputtering Epitaxy EE C245. etch pattern U. Srinivasan . 2. MEMS Devices Polysilicon level 1. Plate Polysilicon level 2.
1 U. Srinivasan © EE C245 Dr. Thara Srinivasan Lecture 2 MEMS Fabrication I : Process Flows and Bulk Micromachining Picture credit: Alien Technology
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