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주사전자현미경의 기본원리와 응용(Part Ⅱ

KIC News, Volume13, , 2010 51 (Part II) Principle and Application of Scanning Electron MicroscopeSeok Kyun Jeong and Jung-Bum ChunElectron Microscope Research Center, COXEM Co., LtdAbstract: topography, morphology, composition crystallography . 30 , 1000 ..Keywords: SEM, electron beam, electron gun, vacuum, electromagnetic lens, coil, EDS1. 1) (Scanning Electron Microscope) 1965 3.

주사전자현미경의 기본원리와 응용(Part Ⅱ) KIC News, Volume 13, No. 1, 2010 53 Figure 3. 전자총 외부, Wehnelt 실린더, 텅스턴 필라멘트 사진.

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