Transcription of 주사전자현미경의 기본원리와 응용(Part Ⅱ
1 KIC News, Volume13, , 2010 51 (Part II) Principle and Application of Scanning Electron MicroscopeSeok Kyun Jeong and Jung-Bum ChunElectron Microscope Research Center, COXEM Co., LtdAbstract: topography, morphology, composition crystallography . 30 , 1000 ..Keywords: SEM, electron beam, electron gun, vacuum, electromagnetic lens, coil, EDS1. 1) (Scanning Electron Microscope) 1965 3.
2 , , , , . X SEM . SEM (condenser lens) (objective lens) , (TEM) , (E-mail: spot spot . radiation SEM (secondary electron) . SEM (brightness) . pixel . SEM Figure 1 (electron gun), , (deflection coil).)
3 Stage , . 10 5 torr , 52 , 13 1 , 2010 Figure 1. Column 3 . ( ) CX 100S . , Electronics, . 10 SEM , . (Electron Gun) . (electron ray) . , . ( ; work function).
4 , , . SEM (thermionic electron gun) (field emission electron gun) Figure 2. Hair Pin [9].. (thermal emission) 100 m V (Figure 2). eV , 3650 K , 2700 K . , ( , ) LaB6 (lanthanium hexaboride) , 1900 K . LaB6 . 1 30 kV . Figure 2 (cathode) , wehnelt cylinder, (anode plate).
5 30 kV SEM . Wehnelt cylinder (Part II)KIC News, Volume13, , 2010 53 Figure 3. , Wehnelt , .Table 1. [1] (A/cm2 sr) ( ) (eV) (%) (Pa) 10540 10030 100 m1110 3 LaB6106200 10005 50 m1110 5 Shottky 108108108> 1000> 1000> 1000< 5 nm< 5 nm15 30 155210 710 6wehnelt cylinder , .. (field emission) (cathode), 1 , 2 . W-point tip 600 2000 potential . FE.
6 1 3 5 kV 2 2 30 kV . (CFE ; cold cathode field emitter), (TFE ; thermally assisted field emitter), (SE ; Schottky field emitter) . 3 Schottky , . (Electromagnetic Lens) (Figure 4).. , (demagnification) .. 54 , 13 1 , 2010 Figure 4. e m V . Bz.
7 (Condensing & Objective Lens) 10 50 m 2 1 , 1/10000 5 200 nm .. Figure 4 ( ) . (aperture, 50 200 m) . spot size (spherical aberration) . , . 2 stigmator . scan Figure 5. SEM Beam focusing .generator spot . Stigmator spot spot . (working distance).
8 , , . , working distance .. Figure 7 pin hole 60 conical . (Aperature) Figure 5 anode 2 3 2 nm (Part II)KIC News, Volume13, , 2010 55 Figure 6. Cross 7. Pin hole lens . (a) , (b) 45 conical , (3) 60 conical [2].beam spot . spot SEM . (aperature) spot size (spherical aberration) . (a) 100 m (b) 200 m (c) 600 mFigure 8.
9 [11]. 50 600 m spot size (spherical aberra- tion) depth of field . Depth of field (working distancd) . WD aperture angle WD depth of field .. X Y .. (Stigmator) spot , . (stigmater) , . Stigmater octupole 8 56 , 13 1 , 2010 Figure 9. 8 Stima-tor [11].
10 (pixel) .. , , . Scanning SEM spot . SEM spot . , .. (pixel) SEM spot . 20 30 keV , , , X .. (SED; Secondary Electron Detector) . SEM.
