Transcription of Probe Card Tutorial - Tektronix
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Probe Card Tutorial - Tektronix
1A GREATER MEASURE OF CONFIDENCEP robe Card TutorialOtto WeedenSenior Applications EngineerKeithley Instruments, body of knowledge related to Probe cards is far too extensive to cover in adocument of this length, so this discussion is limited to issues related to parametric example, although ceramic ring and blade cards aren t the only types of Probe cardsavailable, they are the ones most commonly found in a parametric test environment. Thisdiscussion will focus on Probe card materials and manufacturing procedures and how thesefactors affect the signal path, as well as the parameters of concern and the effect of theseparameters on test results. Other issues, such as RF testing and Probe tipcontamination/cleaning, are also Card TypesMany different types of Probe cards are manufactured, including epoxy, blade,vertical, array, multi-DUT, micro-spring, etc.
Figure 1. Multi-DUT memory probe card. Epoxy ring technology can be extended for low leakage, high frequency, and high temperature applications. The two major components of an epoxy card are the printed circuit board (PCB) and the epoxy ring assembly. Figure 2is a cross-section of a typical epoxy card PCB with the ring assembly attached. Figure 2.
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