Transcription of Probe Card Tutorial - Tektronix
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Probe Card Tutorial - Tektronix
1A GREATER MEASURE OF CONFIDENCEP robe Card TutorialOtto WeedenSenior Applications EngineerKeithley Instruments, body of knowledge related to Probe cards is far too extensive to cover in adocument of this length, so this discussion is limited to issues related to parametric example, although ceramic ring and blade cards aren t the only types of Probe cardsavailable, they are the ones most commonly found in a parametric test environment. Thisdiscussion will focus on Probe card materials and manufacturing procedures and how thesefactors affect the signal path, as well as the parameters of concern and the effect of theseparameters on test results. Other issues, such as RF testing and Probe tipcontamination/cleaning, are also Card TypesMany different types of Probe cards are manufactured, including epoxy, blade,vertical, array, multi-DUT, micro-spring, etc. In this Tutorial , the discussion will be limited toepoxy and blade Probe cards because they are the types most commonly used for parametrictest.
making an epoxy card include probe tip shaping, planarity, final alignment, and QA processes. Probe card design parameters will vary, based on the IC fab’s requirements for device size and shape, number of bond pads, signal characteristics, etc. The probe materialused will
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