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SEMICONDUCTOR DEVICES AND SAMPLE distribution …
SEMICONDUCTOR DEVICES AND TECHNOLOGY David W. Greve Department of Electrical and Computer Engineering Carnegie Mellon University With the exception of clearly identified illustrations, all material copyright Greve, 2012. This document may not be reproduced without permission from the author Second printing. SAMPLE not for distribution Contents chapter 1: SEMICONDUCTOR 1. Introduction ..1 2. 3. The pn 4. Active SEMICONDUCTOR DEVICES ..25 5. The SOI MOSFET ..27 6. Summary ..39 Problems ..40 Appendix. Equations, physical constants, and unit conversions ..44 chapter 2: SEMICONDUCTOR Technology ..47 1. 2. Overview of integrated circuit design and 3. Individual process steps ..48 4. A complete process ..51 5. CMOS digital 6. MOSFET 7. CMOS design and Appendix I: Steps in patterning the silicon nitride Appendix II: Detail of one of the transistors.
In Chapter 1 have chosen to discuss only two semiconductor devices, the junction diode and the fully-depleted silicon-on-insulator field effect transistor. The SOI-FET is the
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