真空镀膜 - SJTU

1 .. kT 10-3. l= @ (3-2-1). 2p d 2 p p d T K p . -2. 10 ~ 10 -5 . ogPV = A - B A B pV. T. T M . G = Pv ( M / 2p kT ) 1 2. -2 -1. @ 10 -4 Pv (M / T )1 2 ) (3-2-2). M pV p a . (3-2-1) .. 85.. 3-2-1 10 .. ( ) ( ) . ( ) ( ) ( ) ( ) ( ) ( ) ( ). Mg 1,090 433 Fe 1,535 2,750 1,447 Al 2,467 1,148. ( ). Sb 1,750 678 Au 1, 2,807 1,465 Sn 2,270 1,189. Pb 1,740 718 Ti 1,660 10 3,287 1,546 Cu 1, 2,567 1,273. In 2,080 952 Ni 1,453 2,732 1,566 Si 1,410 2,355 1,343. Ag 2,212 1,049 Pt 1,772 3,827 100 2,090 C 3,550 4,827 2,681. Ga 2,403 1,093 Mo 2,617 4,612 2,533 W 3,410 5,660 3,309. 2 .. (DC) (RF) .. 3-2-2 . 500 . 3-2-2 500 . He Ne Ar Kr Xr Hg C Al Si Ti 86. Ni Cu Ge Zr Mo Ag W Au 3.. d 0 . d .. d 1. =. d 0 [1 + ( x / h) 2 ]3 2. , (3-2-3). d 1. =. d 0 [1 + ( x / h) 2 ]2. (3-2-4). d dx0. 1 . 1.. 2 h x x 0 1 h 0. 1. 2.. 3-2-1. d/d0 x/h (3-2-1) . 87. 1. 2. 3. 13. (3-2-2) 4.. 1. 2. 3. 4. 12. 5. : a. b. c.. 6. 7. 8. 9. 11. 5. 10. 11. 10. 12. 13.

87 Ni Cu Ge Zr Mo Ag W Au 58.69 63.57 72.60 91.22 95.95 107.88 183.92 197.20 0.16 0.24 0.08 0.02 0.03 0.20 0.01 0.07 1.10 1.80 0.68 0.38 0.48

Loading..

Information

Related search queries