真空镀膜 - SJTU

1 1 .. kT 10-3. l= @ (3-2-1). 2p d 2 p p d T K p . -2. 10 ~ 10 -5 . ogPV = A - B A B pV. T. T M . G = Pv ( M / 2p kT ) 1 2. -2 -1. @ 10 -4 Pv (M / T )1 2 ) (3-2-2). M pV p a . (3-2-1) .. 85.. 3-2-1 10 .. ( ) ( ) . ( ) ( ) ( ) ( ) ( ) ( ) ( ). Mg 1,090 433 Fe 1,535 2,750 1,447 Al 2,467 1,148. ( ). Sb 1,750 678 Au 1, 2,807 1,465 Sn 2,270 1,189. Pb 1,740 718 Ti 1,660 10 3,287 1,546 Cu 1, 2,567 1,273. In 2,080 952 Ni 1,453 2,732 1,566 Si 1,410 2,355 1,343. Ag 2,212 1,049 Pt 1,772 3,827 100 2,090 C 3,550 4,827 2,681. Ga 2,403 1,093 Mo 2,617 4,612 2,533 W 3,410 5,660 3,309. 2 .. (DC) (RF) .. 3-2-2 . 500 . 3-2-2 500 . He Ne Ar Kr Xr Hg C Al Si Ti 86. Ni Cu Ge Zr Mo Ag W Au 3.. d 0 . d .. d 1. =. d 0 [1 + ( x / h) 2 ]3 2. , (3-2-3). d 1. =. d 0 [1 + ( x / h) 2 ]2. (3-2-4). d dx0. 1 . 1.. 2 h x x 0 1 h 0. 1. 2.. 3-2-1. d/d0 x/h (3-2-1) . 87. 1. 2. 3. 13. (3-2-2) 4.. 1. 2. 3. 4. 12. 5. : a. b. c.. 6. 7. 8. 9. 11. 5. 10. 11. 10. 12. 13.

2 6. 9.. 8 7.. 3-2-2 . V .. 10-3 . (3-2-3) 1 2 3. C B 4 5 4 5. 3 . 5 C . B (3-2-4). ( ) . Dl l (3-2-5). d= . l 2. Dl l . l .. l Dl Dl d= = 0. 27. 2 l l (mm). 88. l 5. C.. 3.. B.. 4 .. 1. 2. Dl 3-2-3 3-2-4 .. 1.. 10 NaOH .. 100 .. 2.. 10 NaOH . NaOH .. 3.. 4.. 5.. 89. (1) . (2) 15 . (3) .. 1.. 2.. 90.