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Spin-On-Dielectrics: Characteristics and Modeling Review ...
MSE700 Winter 2003 J. Smythe 1 of 25 UW#7632616 spin -On-Dielectrics: Characteristics and Modeling Review by John A. Smythe March 22, 2003 Material Science and Engineering University of Washington MSE700 Winter 2003 J. Smythe 2 of 25 UW#7632616 Background and Introduction The idea of replacing chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and sputter oxide materials, among others, with a spin -on approach has been of interest in the Semiconductor industry for the last two decades. The basic technique draws from the planarizing nature of a liquid when applied to surface topography.
MSE700 Winter 2003 J. Smythe 1 of 25 UW#7632616 Spin-On-Dielectrics: Characteristics and Modeling Review by John A. Smythe March 22, 2003 Material Science and Engineering
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