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Sputter Coating Technical Brief - IIT Kanpur

Sputter Coating Technical Brief Document Number TB- Sputter Issue 2 (01/02) Introduction HP000107 Quorum Technologies Limited, Company No. 04273003 Registered office: Unit 19, Charlwoods Road, East Grinstead, West Sussex, RH19 2HL, UK Quorum Technologies Ltd main sales office: South Stour Avenue Ashford Kent Tel: ++44(0) 1233 646332 TN23 7RS Fax: ++44(0) 1233 640744 Email: For further information regarding any of the other products designed and manufactured by Quorum Technologies, contact your local representative or directly to Quorum Technologies at the address above. Carbon and Sputter coaters Plasma reactor for ashing and etching High vacuum bench top evaporators Cryo-SEM preparation systems Critical point dryers Freeze dryers for electron microscopy Service and Spares Disclaimer The components and packages described in this document are mutually compatible and guaranteed to meet or exceed the published performance specifications.

Reduced microscope beam damage. Increased thermal conduction Reduced sample charging (increased conduction). Improved secondary electron emission

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