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Sputter Coating Technical Brief - IIT Kanpur

Sputter Coating Technical Brief Document Number TB- Sputter Issue 2 (01/02) Introduction HP000107 Quorum Technologies Limited, Company No. 04273003 Registered office: Unit 19, Charlwoods Road, East Grinstead, West Sussex, RH19 2HL, UK Quorum Technologies Ltd main sales office: South Stour Avenue Ashford Kent Tel: ++44(0) 1233 646332 TN23 7RS Fax: ++44(0) 1233 640744 Email.

Introduction TB-SPUTTER 1 Introduction When a target is bombarded with fast heavy particles, erosion of the target material occurs. The process, when occurring in the conditions of a gaseous glow discharge between an anode and

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