Transcription of Standard Test Method for Sheet Resistance Uniformity ...
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Standard Test Method for Sheet Resistance Uniformity ...
Designation: F 1529 97 Standard Test Method forSheet Resistance Uniformity evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure1 This Standard is issued under the fixed designation F 1529; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or Table corrected editorially and the year date was changed to Dec. 5, test Method uses a four-point probe in a manner different from that of other ASTM methodsfor the measurement of the resistivity or Sheet Resistance of semiconductors.
Designation: F 1529 – 97 Standard Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure1 This standard is issued under the fixed designation F 1529; the number immediately following the designation indicates the year of
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