Transcription of Surface Resistivity and Surface Resistance Measurements
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Surface Resistivity and Surface Resistance MeasurementsUsing a Concentric Ring Probe TechniqueWilliam A. Maryniak, Toshio Uehara, Maciej A. NorasAbstractThe relationship between Surface Resistivity and Surface Resistance is established IntroductionConcepts of Surface Resistance and Surface resis-tivity can be sometimes confusing. Definitions ofboth terms can be found in many books and stan-dards [1 4]. Surface Resistance ,Rs, is defined inall of the aforementioned literature sources as theratio of a DC voltageUto the current,Isflowingbetween two electrodes of specified configurationthat are in contact with the same side of a materialunder test (Figure 1).
Surface Resistivity and Surface Resistance Measurements Using a Concentric Ring Probe Technique electrodes. Meter provides a constant voltage U and measures the current I flowing between elec-trodes. Resistance Rs is then easily calculated and the value of resistivity is equal to the value of resistance multiplied by the geometry coefficient.
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