Transcription of Thinfilm formation of 100nm order atom ization!! …
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Thinfilm formation of 100nm order atom ization!! …
APIC YAMADA CORPORATIONPage 1 / 3 / / / / / / 10nm m 5 m , 10fL 10umCu Line6umMicro Cu bump Electrostatic Atomization 40 um Electrostatic DispensingSuper Atomization30umPitch 50um1umResist : : 200 nm1umUltra trace dispensing Electrostatic Dispensing Electrostatic Atomization 100nm 10fL / Thinfilm formation of 100nm order atomization!!Drawing micro patterning the 5um, 10fL droplets!! / 100nm !! 100nm order atomization!! formation of thinfilms using super atomization by electrostatic force.
Page 2 / 3 APIC YAMADA CORPORATION 薄膜/厚膜の形成 Thin film / Thick film formation 500 um Lens Thinfilm 10 um Metal thin film：1um 6um 微細配線 Micro Patterning 10um Cu line Au line L/S=10/10um Surface Phosphor：φ15um
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