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Thinfilm formation of 100nm order atom ization!! …
www.apicyamada.co.jpPage 2 / 3 APIC YAMADA CORPORATION 薄膜/厚膜の形成 Thin film / Thick film formation 500 um Lens Thinfilm 10 um Metal thin film：1um 6um 微細配線 Micro Patterning 10um Cu line Au line L/S=10/10um Surface Phosphor：φ15um