Transcription of Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
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Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
Atomic Layer Deposition (ALD) Valves 1 Atomic Layer DEPOSITIONA tomic Layer Deposition (ALD) Valves Ultrahigh cycle life with high-speed actuation Cv range from to Full immersion capability up to 392 F (200 C) with thermal actuators Electronic or optical actuator position-sensing option Suitable for Ultrahigh-Purity applications with 316L VIM-VAR stainless steel body Modular surface-mount, tube butt weld, and VCR end connectionsUltrahigh-Purity Valvesfor Atomic Layer Bellows- and Diaphragm-Sealed ValvesATOMIC L AYER DEPOSITIONC ontentsALD3 and ALD6 Diaphragm ValvesFeatures ..2 Materials of Construction .. 3 Technical Data .. 3 Ordering Information and Dimensions Two-Port Valves .. 4 Modular Surface-Mount Valves .. 5 Options and Accessories .. 6 Multiport and Elbow Valves and Monoblock Manifolds.
Cleaning Assembly and Packaging Wetted Surface Roughness (R a) Testing Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags . Electropolished and finished to an average of 5 µin .(0 .13 µm)
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