Transcription of X-ray diffraction techniques for thin films
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X-ray diffraction techniques for thin films
X-ray diffraction techniques for thin films Rigaku Corporation Application Laboratory Takayuki Konya 1. Today's contents (PM). Introduction X-ray diffraction method Out-of-Plane In-Plane Pole figure Reciprocal space mapping High resolution rocking curve X-ray reflectivity 2. 1. Advantage of X-ray diffraction (XRD) method Probed depth control by incidence angle Nondestructive Measurement under atmosphere pressure 3. What can we see? (hkl). a,b,c Thickness, Density, Roughness d Phase Identification Interface, transition layer, etc ?.
2 3 Advantage of X-ray diffraction (XRD) method • Probed depth control by incidence angle • Nondestructive • Measurement under atmosphere pressure
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