Transcription of X-ray diffraction techniques for thin films
{{id}} {{{paragraph}}}
Example: barber
X-ray diffraction techniques for thin films
X-ray diffraction techniques for thin films Rigaku Corporation Application Laboratory Takayuki Konya 1. Today's contents (PM). Introduction X-ray diffraction method Out-of-Plane In-Plane Pole figure reciprocal space mapping High resolution rocking curve X-ray reflectivity 2. 1. Advantage of X-ray diffraction (XRD) method Probed depth control by incidence angle Nondestructive Measurement under atmosphere pressure 3. What can we see? (hkl). a,b,c Thickness, Density, Roughness d Phase Identification Interface, transition layer, etc ?
Reciprocal space mapping • Diffraction intensity distribution is plotted on reciprocal space. ko ghkl kg 2θ/ω Δω 2 θ / ω ω 20 Epitaxial layer structures 00l cubic[112] hh0 00l cubic[112] hh0 tetragonal[112] 00l film[001] hh0 substrate[001] Relaxation Strain Misorientation
Loading..
Tags:
Information
Domain:
Source:
Link to this page:
Please notify us if you found a problem with this document: