Zeta Potential of CMP Slurries df FINAL.ppt - HORIBA

David Fairhurst, Consultants, LtdThe Utility of Zeta Potential Measurements in the Characterization of CMP SlurriesHORIBA ScientificWebinarJune 12th2013 Dispersed SystemsExtent of InterfaceInterfacial ChemistryStability and StructureSystem PropertiesAn interfacealways exists when one component (phase I) isdispersed in a state of subdivision in a medium (phase II) The interfacial extent and interfacial chemistry are not independent parametersTwo fundamentalparameters control the nature and behavior all dispersed systemsMeasurement Techniques used to Characterize Particulate SuspensionsINTERFACIAL EXTENTINTERFACIAL CHEMISTRYP article Size and Distribution*Particle Shape and Morphology*Surface Area*(external/internal)PorositySurface Charge*Nature/type of group(s)Number and distributionDissociation/ionizationPrefe rential adsorptionHydrophobic/hydrophilic balanceSurface(interfacial)TensionContac t Angle*The Nature of Surface Charge in WaterMineral oxide crystal la

David Fairhurst, Ph.D. Colloid Consultants, Ltd The Utility of Zeta Potential Measurements in the Characterization of CMP Slurries HORIBA Scientific

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