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Silicon Planar Epitaxial
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Power MOSFET Basics
www.aosmd.com- REPI: resistance from the top layer of silicon (epitaxial silicon, also known as epi); epi controls the amount of blocking voltage the MOSFET can sustain - RSUBS: resistance from the silicon substrate on which the epi is grown Figure 3a: RDSON components of a trench MOSFET For a planar MOSFET, the RDSON components are similar to
Atomic Layer Deposition - ALD Academy
www.aldacademy.comCoverage of the planar surface is evaluat-ed using the uniformity while the coverage of 3D features is evaluated using the conformality. The growth con- ... uniformly over 300 mm silicon wafers, is necessary. With the advent of 3D transistors in the 22 ... for epitaxial growth, the overall success of ALD for crys-