AES-REELSを用いた炭素材料の局所構造解析技術
るdlc膜への応用例を紹介する。 本稿でとりあげる3種類のdlcの仕様を表1に示す。 dlc1とdlc2は切削工具用の被覆膜で高硬度を重視し
Download AES-REELSを用いた炭素材料の局所構造解析技術
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