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Atomic Layer Deposition - ALD Academy

Atomic Layer Deposition - ALD Academy

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3 Published as: H.C.M. Knoops, S.E. Potts, A.A. Bol, and W.M.M. Kessels, Ch. 27 - Atomic Layer Deposition (pp. 1101–1134) in Handbook of Crystal Growth, edited by T. Kuech (Elsevier, 2015). ter level (Low temperature: The ability to deposit high-quality materials with a high purity and a high density (no voids or pinholes) at low substrate temperatures.

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