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BEOL Interconnect Innovations for Improving Performance

BEOL Interconnect Innovations for Improving Performance

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Feb 23, 2017 · Innovations in Silicon Manufacturing February 23, 2017 Paul Besser, NCCAVS Symposium in San Jose, CA 4 11 Elements ... (reduction) •RC Delay ... •Process-induced damage to trench sidewall and top interface is a major integration challenge**

  Performance, Innovation, Reduction, Process, Manufacturing, Improving, Delay, Interconnect, Lobe, Beol interconnect innovations for improving performance

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