Search results with tag "Beol interconnect innovations for improving performance"

BEOL Interconnect Innovations for Improving Performance

Feb 23, 2017 · Improving performance, ... •Reduce barrier thickness ... but dielectrics have h process-induced damage and i mechanical strength •Damage h the effective k and can erase the capacitance benefit •As a result, at tight pitch interconnects, industry options are **

  Performance, Innovation, Barriers, Improving, Strength, Interconnect, Lobe, Beol interconnect innovations for improving performance