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BEOL Interconnect Innovations for Improving Performance

BEOL Interconnect Innovations for Improving Performance

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Feb 23, 2017 · Ultra Low-K ULK Cap Cu Contact Dual Si 2 Porous LK Cu Alloys ELD Cu TiSi 2 ALD W NiPtSi Technology Node (nm) 350 250 180/130 90 65 /45 45/32 28/20 14 10/7 nm FTEOS ILD Cu Barriers Cu wiring CVD W MOCVD TiN CoSI 2 Eless Co via prefill Co Metal Air gap at tight pitch New Cu BM Eless Ni MIS TiSi x Air Gap Selective Metal caps ...

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