MACHINING OPERATIONS AND MACHINE TOOLS
©2002 John Wiley & Sons, Inc. M. P. Groover, “Fundamentals of Modern Manufacturing 2/e” MACHINING OPERATIONS AND MACHINE TOOLS •Turning and …
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POWDER METALLURGY - 國立中興大學
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www.me.nchu.edu.twPhotolithography •Uses light radiation to expose a coating of photoresist on the surface of the wafer Common light source in wafer processing is ultraviolet light, due to its short wavelength •A mask containing the required geometric pattern for each layer separates the light source from the wafer, so that only the portions of the ...
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