MEMS: Microelectromechanical Systems
" Gyroscopes " High Aspect Ratio Electrostatic Resonators " Thermal Actuators " Magnetic Actuators " Comb-drives . 6 Accelerometers ! Applications: " Air bag crash sensors " Active suspension systems " Antilock brake systems " Ride control systems ! Units of mV/g MEMS Accelerometer Mass, Spring, Damper ...
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