MICRO MACHINING PROCESSES
Fig: Chemo mechanical Polishing (CMP) Ref: T.H. Tsai et al. (2003) Prof. V.K. Jain Dept. Of Mechanical Engineering IIT Kanpur. 46 MAF AFM MRAFF MRF CMP MFP Workpiece F t F n Media Abrasiv e S N Spindle Ceramic balls Drive Shaft Al Base Steel yoke Magnetic Fluid & Abrasives Float Magnets S N S N N S N S N S Electromagnet pole Motion N S ...
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