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VLSI FABRICATION TECHNOLOGY

VLSI FABRICATION TECHNOLOGY

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VLSI FABRICATION TECHNOLOGY Introduction Since the first edition of this text, we have witnessed a fantastic evolution in VLSI (very-large-scaleintegratedcircuits)technology.Inthelate1970s,non-self-alignedmetalgate MOSFETs with gate lengths in the order of 10μm were the norm. Current VLSI fabrication

  Technology, Fabrication, Vlsi, Vlsi fabrication technology

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