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X-ray diffraction techniques for thin films

X-ray diffraction techniques for thin films

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Reciprocal space mapping • Diffraction intensity distribution is plotted on reciprocal space. ko ghkl kg 2θ/ω Δω 2 θ / ω ω 20 Epitaxial layer structures 00l cubic[112] hh0 00l cubic[112] hh0 tetragonal[112] 00l film[001] hh0 substrate[001] Relaxation Strain Misorientation

  Thin, Technique, Film, Cubic, Diffraction, Reciprocal, X ray diffraction techniques for thin films

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