Yield Analysis and Optimization - USI – Informatics

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Figure 1: An SEM (Scanning Electron Microscope) picture showing a bridging fault on Metal 3. Note the row of vias on each metal line. ... a very brief introduction is essential to understand flnal yield measurement at the foundry. ... their disposal. For example, with focused ion beam (FIB), existing circuit lines can be cut

  Analysis, Introduction, Focused, Yield, Beam, Electron, Optimization, Scanning, Microscope, Scanning electron microscope, Yield analysis and optimization, Focused ion beam