Wafer Loader - techsansystem.co.kr

1 AL110-8 Dimensions(unit : mm)AL110-6 Dimensions(unit : mm)( ) Combined with MX51 Wafer LoaderSuper clean and fast Wafer transferSpecifications are subject to change without any obligation on the part of the versions200/150mm compatible versions100/125/150mm compatible versionsItemLLMLBMB LMBLLMLBMB LMBLLMLMBW afer diameters*1200mm orientation flat type, 200mm notch type__150mm orientation flat type_100mm, 125mm and 150mm orientation flat type_CassetteFluoroware, H-ber type_Number of cassetteOne_Inspection modesSequential and sampling_Transfer modesMicro inspection_____Top macro inspection___ _ ____Back macro inspection____ ___2nd back surface macro inspection____ ___Orientation flat/notchOne every 90 , alignment also available before _alignment unloading wafers into cassetteNo-contact centering_Wafer transferRobot arms with vacuum pickup_Adaptable microscope*2MX61_MX51_Dimensions (mm)580 (W) x580 (D) x297 (H)490 (W) x520 (D) x297 (H)Weight (kg)30323131333032313133262830 UtilitiesPower source:AC100 to 120V or AC220 to 240V 50/60Hz,Vacuum pressure: -67kPa to -80kPaSpecificationsModel*1 Applicable for SEMI and JEIDA 6- and 8-inch wafers.

2 *2 Besides the MX61 and MX51, other equivalent microscopes are available. Please contact your nearest OLYMPUS distributors about the LOADERAL110 SERIES895580580520297430520297490785(780 ) OLYMPUS CORPORATION obtains in Japan M1559E-0405 BAL110-LMB886654AL110 Series : Higher Efficiency For Superior Productivity Two types of Wafer loaders to cover100mm-200mm Wafer sizes*1 The AL110-8 series is designed for200mm Wafer inspection. It also offersmixed size inspection (200/150mm)optionally. The AL110-6 series is designedfor 150mm Wafer inspection. Itaccommodates different size(150/125/100mm) inspection withchanging optional parts. *1 For special specification such as 75mm-size, 50mm-size,thinner Wafer , or the SMIF compatible, please contact yournearest OLYMPUS distributorsOver 20% less tact timeThe AL110 Series offers the capabilitiesthat reduce Wafer transfer time by morethan 20% compared with conventionalequipment: no-contact centering; highperformance transmitted-type photosensor to detect notches; and faster waferexchange setting of inspection modesMicro, top macro and surface macroinspections can be set as inspectionmodes, and their duration can beprogrammed according to the inspectionpurpose, while other inspection patternsare pre-programmed for particularapplications.

3 The remote control box(optional) allows operations such asregistering defected wafers, startinginspection and storing wafers to beperformed close to the operator. Making operation easier and morecomfortableErgonomic design incorporates low heightcarrier for easy front loading andcomfortable viewing angle. Grips on themicroscope stage are also positioned atthe front close to the operator to minimizeunnecessary arm movements and allowthe operator to maintain a natural, relaxedposition even during long operations.(Complies with SEMI S8 standards)L: Micro inspectionThe second Wafer is prepared while the first isundergoing inspectionM: Top macro inspectionThe joystick allows a tilt of up to max. 30 *Constant settings can be made for direction androtation speedB: Back surface macro inspection10 steps can be set, from horizontal to90 - 160 200mm wafers onlyBoth 200mm and150mm wafers150mm wafers only125mm wafers only100mm wafers onlyOutstanding safety and reliabilityNumerous safely sensors are provided tomonitor the state of the Wafer and preventdamage to the Wafer as part of its self-diagnostic program.

4 (Complies with SEMIS2 and CE standards.)Safe Wafer transfer with scanning stageA combination with scanning stageMS200 which works with AL110 serieswith its handshake function creates asimple workstation. MS200 Improved cleanlinessThe use of highly precise no-contactcentering ensures that contact betweenthe Wafer and the equipment is kept to anabsolute minimum. Additional measures toenhance cleanliness include usingstainless steel for the macro handle coverto eliminate dust during Wafer transfer andother macro inspection of thewafer s back surfaceThe AL110 Series offers 100% area backmacro inspection. Thanks to the newlydeveloped 2nd back macro inspection technology. Internal optical reflection iseliminated with matt black finish to thepossible parts surface.

5 AL110-8 SERIESS tandard Wafer Loader for 150mm and 200mm wafers, with high-performance functions in a truly compact designAL110-6 SERIESF irst-ever no-contact centering for small diameter wafers(100mm-150mm) sets the new loading standard200/150mm200mm15 0mm12 5mm10 0mmAL110-LMB86+AL110-VS8+MX61AL110-LMB6+ AL110-VS6+MX51*AL110 complies individually with50mm and 75mm accessories:Confocal system U-CFUAL110-LMB886654AL110 Series : Higher Efficiency For Superior Productivity Two types of Wafer loaders to cover100mm-200mm Wafer sizes*1 The AL110-8 series is designed for200mm Wafer inspection. It also offersmixed size inspection (200/150mm)optionally. The AL110-6 series is designedfor 150mm Wafer inspection. Itaccommodates different size(150/125/100mm) inspection withchanging optional parts.

6 *1 For special specification such as 75mm-size, 50mm-size,thinner Wafer , or the SMIF compatible, please contact yournearest OLYMPUS distributorsOver 20% less tact timeThe AL110 Series offers the capabilitiesthat reduce Wafer transfer time by morethan 20% compared with conventionalequipment: no-contact centering; highperformance transmitted-type photosensor to detect notches; and faster waferexchange setting of inspection modesMicro, top macro and surface macroinspections can be set as inspectionmodes, and their duration can beprogrammed according to the inspectionpurpose, while other inspection patternsare pre-programmed for particularapplications. The remote control box(optional) allows operations such asregistering defected wafers, startinginspection and storing wafers to beperformed close to the operator.

7 Making operation easier and morecomfortableErgonomic design incorporates low heightcarrier for easy front loading andcomfortable viewing angle. Grips on themicroscope stage are also positioned atthe front close to the operator to minimizeunnecessary arm movements and allowthe operator to maintain a natural, relaxedposition even during long operations.(Complies with SEMI S8 standards)L: Micro inspectionThe second Wafer is prepared while the first isundergoing inspectionM: Top macro inspectionThe joystick allows a tilt of up to max. 30 *Constant settings can be made for direction androtation speedB: Back surface macro inspection10 steps can be set, from horizontal to90 - 160 200mm wafers onlyBoth 200mm and150mm wafers150mm wafers only125mm wafers only100mm wafers onlyOutstanding safety and reliabilityNumerous safely sensors are provided tomonitor the state of the Wafer and preventdamage to the Wafer as part of its self-diagnostic program.

8 (Complies with SEMIS2 and CE standards.)Safe Wafer transfer with scanning stageA combination with scanning stageMS200 which works with AL110 serieswith its handshake function creates asimple workstation. MS200 Improved cleanlinessThe use of highly precise no-contactcentering ensures that contact betweenthe Wafer and the equipment is kept to anabsolute minimum. Additional measures toenhance cleanliness include usingstainless steel for the macro handle coverto eliminate dust during Wafer transfer andother macro inspection of thewafer s back surfaceThe AL110 Series offers 100% area backmacro inspection. Thanks to the newlydeveloped 2nd back macro inspection technology. Internal optical reflection iseliminated with matt black finish to thepossible parts surface.

9 AL110-8 SERIESS tandard Wafer Loader for 150mm and 200mm wafers, with high-performance functions in a truly compact designAL110-6 SERIESF irst-ever no-contact centering for small diameter wafers(100mm-150mm) sets the new loading standard200/150mm200mm15 0mm12 5mm10 0mmAL110-LMB86+AL110-VS8+MX61AL110-LMB6+ AL110-VS6+MX51*AL110 complies individually with50mm and 75mm accessories:Confocal system U-CFUAL110-8 Dimensions(unit : mm)AL110-6 Dimensions(unit : mm)( ) Combined with MX51 Wafer LoaderSuper clean and fast Wafer transferSpecifications are subject to change without any obligation on the part of the versions200/150mm compatible versions100/125/150mm compatible versionsItemLLMLBMB LMBLLMLBMB LMBLLMLMBW afer diameters*1200mm orientation flat type, 200mm notch type__150mm orientation flat type_100mm, 125mm and 150mm orientation flat type_CassetteFluoroware, H-ber type_Number of cassetteOne_Inspection modesSequential and sampling_Transfer modesMicro inspection_____Top macro inspection___ _ ____Back macro inspection____ ___2nd back surface macro inspection____ ___Orientation flat/notchOne every 90.

10 Alignment also available before _alignment unloading wafers into cassetteNo-contact centering_Wafer transferRobot arms with vacuum pickup_Adaptable microscope*2MX61_MX51_Dimensions (mm)580 (W) x580 (D) x297 (H)490 (W) x520 (D) x297 (H)Weight (kg)30323131333032313133262830 UtilitiesPower source:AC100 to 120V or AC220 to 240V 50/60Hz,Vacuum pressure: -67kPa to -80kPaSpecificationsModel*1 Applicable for SEMI and JEIDA 6- and 8-inch wafers.*2 Besides the MX61 and MX51, other equivalent microscopes are available. Please contact your nearest OLYMPUS distributors about the LOADERAL110 SERIES895580580520297430520297490785(780 ) OLYMPUS CORPORATION obtains in Japan M1559E-0405B