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Plasma Sources Sci Technol 9 Introduction To Gas
Found 2 free book(s)
Plasma Sources Sci. Technol. 9 Introduction to gas …
home.sandiego.eduPlasma Sources Sci. Technol. 9 (2000) 517–527. Printed in the UK PII: S0963-0252(00)15592-6 Introduction to gas discharges N St J Braithwaite The Open University, Oxford Research Unit, Foxcombe Hall, Boars Hill, Oxford OX1 5HR,
Effects of hydrogen on plasma etching for silicon …
www.ispc-conference.org21st International Symposium on Plasma Chemistry (ISPC 21) Sunday 4 August – Friday 9 August 2013 Cairns Convention Centre, Queensland, Australia Effects of hydrogen on plasma etching for silicon and silicon nitride