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Tutorial for MEMS microphones - STMicroelectronics

Tutorial for MEMS microphones - STMicroelectronics

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The sensor uses MEMS technology (Micro-Electrical-Mechanical Systems) and it is basically a silicon capacitor. The capacitor consists of two silicon plates/surfaces. One plate is fixed while the other one is movable (respectively, the green plate and the grey one shown in the following figure). The fixed surface is covered by an electrode to ...

  System, Tutorials, Mems, Microphone, Tutorial for mems microphones

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