Search results with tag "Transit time"

PLASMA RIE ETCHING FUNDAMENTALS AND ...

Thermal-based flow meter Q [sccm] T 1 T 2 T 2 – T 1= C p ×Q C p is specific heat. 8 [HORIBASTEC] MFC G BMFC or Gas Box G Mixed gas line as ... ¾Ion transit time (T ion) is the time it takes the ion to traverse the sheath. ¾1/Freq << T ion! ... time Pressure RF coil power RF bias power Gas flow [sccm]

  Time, Flows, Transit, Meters, Flow meters, Transit time