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WET-CHEMICAL ETCHING OF METALS - MicroChemicals GmbH

the resist fi lm layer in a short time or can peel it off in the case of cross-linked negative resists. Homogeneity of Al Etching The actual aluminium etching starts when, for exam-ple, using phosphoric acid as a component of typical Al-etching mixtures, dissolves a few nm thick native aluminium oxide fi lm present on aluminium surfaces.

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