Search results with tag "Metallization"

Chapter 11 PVD and Metallization - ntut.edu.tw

17 2006/5/23 33 Titanium Nitride PVD •Reactive sputtering process •Ar and N 2 •N 2 molecules dissociate in plasma •Free nitrogen radicals react with Ti to form a thin layer of TiN on target surface.

  Surfaces, Chapter, Chapter 11 pvd and metallization, Metallization, Nitride