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Brazilian Journal of Ph ysics, v ol. 31, no. 2, June, 2001 299
www.sbfisica.org.brBrazilian Journal of Ph ysics, v ol. 31, no. 2, June, 2001 299 Analysis of SiO 2 Thin Films Dep osited b y PECVD Using an Oxygen-TEOS-Argon Mixture Carlos E. Viana, Ana N.