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エリプソメトリ法 - Tatsuru Shirafuji
www.t-shirafuji.jp0 0 0 Absolute transmittance Relative reflectance Absolute reflectance Al (b) (c) (d) (e) Ellipsometry (Ep, Es) in (Ep, Es) out 0 (a)Relative transmittance 図2: 薄膜の相対透過率(a) と試料全体の絶対透過率(b)，Al に