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chapter2.fm Page 33 Monday, September 4, 2000 …
bwrcs.eecs.berkeley.eduIC packaging Future Trends in Integrated Circuit Technology 2.1 Introduction 2.2 Manufacturing CMOS Integrated Circuits 2.2.1 The Silicon Wafer 2.2.2 Photolithography 2.2.3 Some Recurring Process Steps ... cess that lies at the core of the semiconductor revolution. Yet, some insight in the steps ...