Search results with tag "Site flatness measurement system with accuracy"

Site Flatness Measurement System with Accuracy of Sub ...

Site Flatness Measurement System with Accuracy of Sub-nanometer Order for Silicon Wafer Kazuhiko TAHARA ＊1, Hideki MATSUOKA , Noritaka MORIOKA , Masato KANNAKA＊2 ＊1 Technical Engineering Dept., LEO Business, Kobelco Research Institute, Inc. ＊2 Production Systems Research Laboratory, Technical Development Group A new system using a heterodyne interferometer has been

  With, System, Measurement, Site, Accuracy, Flatness, Site flatness measurement system with accuracy