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High and Ultra High Vacuum Systems - vacuumcursus.nl
www.vacuumcursus.nlHigh Vacuum Systems zPressure range z10-6 to 10-8 torr zApplications zElectronic Devices z Depositions (sputtering, evaporation, pulsed laser) z Plasma Etching z Ion Implantations zNon-surface material characterization (EDS, SEM, etc…)