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Search results with tag "Bulk micromachining"
MEMS Fabrication I : Process Flows and Bulk Micromachining
www-bsac.eecs.berkeley.edu• Tools Needed for MEMS Fabrication • Photolithography Review ... • Good thermal conductor, low thermal expansion coefficient • High piezoresistivity. 9 ... • RF frequency, 13.56 MHz • RF power, 10’s to – 1000’s W • Pressure, mTorr – >100 Torr sheath. 20