Search results with tag "Polymumps"

PolyMUMPs Design Handbook - MEMSCAP

CHAPTER 1 2 PolyMUMPs™ Design Handbook, Rev. 13.0 FIGURE 1.1. Cross sectional view showing all 7 layers of the PolyMUMPs process (not to scale). Poly0 Poly1 Poly2 Metal Nitride 1st Oxide 2nd Oxide Figure 1.1 is a cross section of the three-layer polysilicon …

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