Search results with tag "Stiction"

Anti-Stiction Coatings for High Reliability MEMS

ANTI-STICTION COATINGS FOR HIGH RELIABILITY MEMS Nilesh Gunda, Santosh K. Jha and Suri A. Sastri Surmet Corporation, 33 B Street Burlington, MA 01803 (USA).

  High, Reliability, Coating, Mems, Stiction coatings for high reliability mems, Stiction